Open AccessStudy of rear pecvd dielectrics stacks for industrial silicon solar cells
Author(s) -
Julien Dupuis,
Erwann Fourmond,
V. Mong-The Yen,
O. Nichiporuk,
Mathias Greffioz,
N. Le Quang,
M. Lemiti
Publication year - 2009
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - plasma enhanced chemical vapor deposition , materials science , passivation , dielectric , optoelectronics , solar cell , silicon , capacitance , silicon nitride , semiconductor , electrode , nanotechnology , layer (electronics) , chemistry