Open AccessLocal substrate removal for next generation GaN-on-Silicon power transistors
Author(s) -
Youssef Hamdaoui,
Idriss Abid,
Katir Ziouche,
F Medjdoub
Publication year - 2022
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - silicon , substrate (aquarium) , transistor , optoelectronics , materials science , gallium nitride , nanotechnology , electrical engineering , engineering , voltage , biology , layer (electronics) , ecology
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