Open AccessManagement of Time Constraints Tunnels in Semiconductor Manufacturing: A Decision Support System
Author(s) -
Benjamin Anthouard,
Valeria Borodin,
Stéphane DauzèrePérès,
Quentin Christ,
Renaud Roussel
Publication year - 2022
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - decision support system , computer science , semiconductor device fabrication , manufacturing engineering , industrial engineering , systems engineering , engineering , artificial intelligence , electrical engineering , wafer
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