Open AccessGas aggregation source based on pulsed plasma sputtering for the synthesis of PtX catalytic nanoclusters
Author(s) -
Amaël Caillard,
Stéphane Cuynet,
Thomas Lecas,
Maxime Mikikian,
Pascal Andreazza,
Pascal Brault
Publication year - 2014
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - nanoclusters , high power impulse magnetron sputtering , sputter deposition , materials science , cavity magnetron , sputtering , optoelectronics , pulsed dc , ionization , thin film , transmission electron microscopy , analytical chemistry (journal) , plasma , nanotechnology , chemistry , ion , physics , organic chemistry , quantum mechanics , chromatography
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