Open AccessHigh-quality Ge/Si virtual substrates fabricated by a low cost and scalable process
Author(s) -
Youcef A. Bioud,
Abderraouf Boucherif,
Maksym Myronov,
G. Patriarche,
Nadi Braidy,
Dominique Drouin,
Richard Arès
Publication year - 2018
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - materials science , annealing (glass) , epitaxy , optoelectronics , scalability , dislocation , etching (microfabrication) , substrate (aquarium) , germanium , strain engineering , silicon , layer (electronics) , nanotechnology , computer science , composite material , oceanography , database , geology