Open AccessUltrafast laser writing deep inside silicon
Author(s) -
Andong Wang,
Amlan Das,
O. Utéza,
David Grojo
Publication year - 2021
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
Subject(s) - ultrashort pulse , silicon , laser , materials science , optoelectronics , ultrafast optics , computer science , optics , physics