Open AccessMicro-Optical Components Manufactured in Glass by Femtosecond Laser Irradiation Followed by Chemical Etching
Author(s) -
Jean-Loup Skora,
Olivier Gaiffe,
Sylwester Bargiel,
L Tavernier,
M. de Labachelerie,
Nicolas Passilly
Publication year - 2021
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - femtosecond , irradiation , materials science , etching (microfabrication) , isotropic etching , laser , optoelectronics , optical glass , optical materials , optics , composite material , physics , layer (electronics) , nuclear physics