Open AccessInvestigating the nucleation of Al2O3 on clean Si in ALD : plasma post and pre-processing
Author(s) -
Pascal Dubreuil,
E. Scheid
Publication year - 2022
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - nucleation , plasma , plasma processing , plasma chemistry , materials science , chemistry , physics , nuclear physics , organic chemistry