Open AccessAnalysis of Wetting Transition and Pattern Collapse During the Drying Process of Deep Trench Isolation Structures Using Ultra-high Frequency Acoustic Waves and SEM Imaging.
Author(s) -
Abbas Salhab,
Julien Carlier,
Malika Toubal,
Pierre Campistron,
Marc Neyens,
Bertrand gaillard,
V. Thomy
Publication year - 2022
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - English
Resource type - Conference proceedings
Subject(s) - wetting , materials science , process (computing) , isolation (microbiology) , trench , acoustics , composite material , computer science , physics , layer (electronics) , operating system , microbiology and biotechnology , biology
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