Open Access3D nanofabrication by reverse contact UV nanoimprint lithography
Author(s) -
Nikolaos Kehagias,
V. Reboud,
G. Chansin,
Marc Zelsmann,
C. Jeppesen,
C. Schuster,
M. Kubenz,
F. Reuther,
C.M. Gruetzner,
C. M. Sotomayor Torres
Publication year - 2007
Publication title -
hal (le centre pour la communication scientifique directe)
Language(s) - Uncategorized
Resource type - Conference proceedings
Subject(s) - nanolithography , nanoimprint lithography , lithography , resist , next generation lithography , materials science , extreme ultraviolet lithography , computational lithography , electron beam lithography , optoelectronics , nanotechnology , x ray lithography , fabrication , medicine , alternative medicine , pathology , layer (electronics)