Open AccessEffects of Groove Shape Dimension on Lapping Characteristics of Sapphire Wafer
Author(s) -
Taekyung Lee,
Sangjik Lee,
Haedo Jeong,
Hyoungjae Kim
Publication year - 2016
Publication title -
journal of the korean society of tribologists and lubrication engineers
Language(s) - English
Resource type - Journals
eISSN - 2287-4666
pISSN - 1229-4845
DOI - 10.9725/kstle.2016.32.4.119
Subject(s) - groove (engineering) , materials science , lapping , abrasive , wafer , composite material , surface roughness , surface finish , sapphire , optics , metallurgy , optoelectronics , laser , physics
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