Open AccessDevelopment of Implantable Blood Pressure Sensor Using Quartz Wafer Direct Bonding and Ultrafast Laser Cutting
Author(s) -
Sung-Il Kim,
Eung-Bo Kim,
Sang-kyun So,
Jiyeon Choi,
Yeun-Ho Joung
Publication year - 2016
Publication title -
ui'gong haghoeji/uigong hakoeji
Language(s) - English
Resource type - Journals
eISSN - 2288-9396
pISSN - 1229-0807
DOI - 10.9718/jber.2016.37.5.168
Subject(s) - materials science , pressure sensor , microfabrication , microelectromechanical systems , inductor , capacitor , capacitive sensing , linearity , hfss , optoelectronics , fabrication , electronic engineering , acoustics , electrical engineering , voltage , engineering , mechanical engineering , physics , medicine , alternative medicine , microstrip antenna , pathology , antenna (radio)