Open AccessWafer Position Recognition System Using Radial Shape Calibrator
Author(s) -
Byeong-Guk Lee,
Joon-Jae Lee
Publication year - 2011
Publication title -
meolti midieo hakoe nonmunji/meolti'mi'dieo haghoe nonmunji
Language(s) - Uncategorized
Resource type - Journals
eISSN - 2384-0102
pISSN - 1229-7771
DOI - 10.9717/kmms.2011.14.5.632
Subject(s) - wafer , position (finance) , reliability (semiconductor) , position error , process (computing) , engineering , artificial intelligence , computer vision , function (biology) , line (geometry) , computer science , embedded system , orientation (vector space) , electrical engineering , mathematics , power (physics) , physics , geometry , finance , quantum mechanics , evolutionary biology , economics , biology , operating system