Open AccessMoisture Gettering by Porous Alumina Films on Textured Silicon Wafer
Author(s) -
임효령,
엄누시아,
조정호,
좌용호
Publication year - 2015
Publication title -
hwahag gonghag/hwahak gonghak
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.168
H-Index - 9
eISSN - 2233-9558
pISSN - 0304-128X
DOI - 10.9713/kcer.2015.53.3.401
Subject(s) - materials science , getter , wafer , moisture , anodizing , silicon , desorption , microelectronics , adsorption , sorption , porosity , composite material , chemical engineering , aluminium , optoelectronics , chemistry , organic chemistry , engineering