Open AccessAnalysis of the layers properties obtained in the magnetron sputtering process using a targets with modified composition
Author(s) -
Z. Lubańska,
T. Grudniewski
Publication year - 2014
Publication title -
journal of civil engineering environment and architecture
Language(s) - English
Resource type - Journals
eISSN - 2300-8903
pISSN - 2300-5130
DOI - 10.7862/rb.2014.99
Subject(s) - composition (language) , materials science , sputter deposition , process (computing) , cavity magnetron , sputtering , process engineering , computer science , nanotechnology , engineering , thin film , programming language , art , literature
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