Open AccessAttempt of the layer modification using externally controlled elements during magnetron sputtering
Author(s) -
T. Grudniewski,
Sławomir Czernik,
Z. Lubańska,
Roman Lichograj,
Piotr Lichograj
Publication year - 2014
Publication title -
journal of civil engineering environment and architecture
Language(s) - English
Resource type - Journals
eISSN - 2300-8903
pISSN - 2300-5130
DOI - 10.7862/rb.2014.87
Subject(s) - layer (electronics) , sputter deposition , sputtering , cavity magnetron , materials science , high power impulse magnetron sputtering , optoelectronics , nanotechnology , thin film
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