Open AccessAttempt of the layer modification using externally controlled elements during magnetron sputtering
Author(s) -
T. Grudniewski,
Sławomir Czernik,
Z. Lubańska,
Roman Lichograj,
Piotr Lichograj
Publication year - 2014
Publication title -
czasopismo inżynierii lądowej, środowiska i architektury
Language(s) - English
Resource type - Journals
eISSN - 2300-8903
pISSN - 2300-5130
DOI - 10.7862/rb.2014.87
Subject(s) - layer (electronics) , sputter deposition , sputtering , cavity magnetron , materials science , high power impulse magnetron sputtering , optoelectronics , nanotechnology , thin film