Open AccessInternal Defect Position Analysis of a Multi-Layer Chip Using Lock-in Infrared Microscopy
Author(s) -
Seon-Jin Kim,
Kye-Sung Lee,
Hwan Hur,
Haksun Lee,
Hyun-Cheol Bae,
KwangSeong Choi,
Ghiseok Kim,
Geon-Hee Kim
Publication year - 2015
Publication title -
bipagoe geomsa hakoeji/bipa'goe geomsa haghoeji
Language(s) - English
Resource type - Journals
eISSN - 2287-402X
pISSN - 1225-7842
DOI - 10.7779/jksnt.2015.35.3.200
Subject(s) - infrared , thermography , materials science , infrared microscopy , microscope , lens (geology) , silicon , optics , semiconductor , layer (electronics) , infrared heater , position (finance) , resolution (logic) , microscopy , optoelectronics , lock (firearm) , nanotechnology , physics , engineering , computer science , mechanical engineering , finance , artificial intelligence , economics