Open AccessRotational Stability and Lubrication State Evaluation of the Polishing Head for High Speed Polishing
Author(s) -
Hocheol Lee,
Min-Seok Choi
Publication year - 2016
Publication title -
journal of the korean society of manufacturing technology engineers
Language(s) - English
Resource type - Journals
eISSN - 2383-4846
pISSN - 2233-6036
DOI - 10.7735/ksmte.2016.25.4.301
Subject(s) - polishing , lubrication , head (geology) , rotational speed , materials science , chemical mechanical planarization , diamond , rotation (mathematics) , mechanics , mechanical engineering , composite material , engineering , physics , geology , mathematics , geometry , geomorphology
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