Open AccessDevelopment of Low-Vibration Controller for Ultra-Precision Dual Stage
Author(s) -
Seok Il Kang,
Jung-Han Kim
Publication year - 2016
Publication title -
journal of the korean society of manufacturing technology engineers
Language(s) - English
Resource type - Journals
eISSN - 2383-4846
pISSN - 2233-6036
DOI - 10.7735/ksmte.2016.25.1.75
Subject(s) - settling time , voice coil , control theory (sociology) , vibration , stage (stratigraphy) , master/slave , input shaping , controller (irrigation) , perturbation (astronomy) , settling , computer science , electromagnetic coil , vibration control , engineering , control engineering , physics , acoustics , step response , control (management) , artificial intelligence , paleontology , agronomy , electrical engineering , quantum mechanics , environmental engineering , biology , operating system
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