Open AccessFabrication of a Silicon Nanostructure Array Embedded in a Polymer Film by using a Transfer Method
Author(s) -
Hocheol Shin,
Dong-Ki Lee,
Younghak Cho
Publication year - 2016
Publication title -
journal of manufacturing engineering and technology/han-guk saengsan jejo siseutem hakoeji
Language(s) - English
Resource type - Journals
eISSN - 2383-4846
pISSN - 2233-6036
DOI - 10.7735/ksmte.2016.25.1.62
Subject(s) - materials science , nanostructure , silicon , polyethylene terephthalate , microelectromechanical systems , polymer , reactive ion etching , embossing , dry etching , etching (microfabrication) , photolithography , polycarbonate , lithography , nanotechnology , fabrication , optoelectronics , composite material , layer (electronics) , medicine , alternative medicine , pathology