Open AccessFabrication of a Silicon Nanostructure Array Embedded in a Polymer Film by using a Transfer Method
Author(s) -
Hocheol Shin,
Dong-ki Lee,
Younghak Cho
Publication year - 2016
Publication title -
journal of the korean society of manufacturing technology engineers
Language(s) - English
Resource type - Journals
eISSN - 2383-4846
pISSN - 2233-6036
DOI - 10.7735/ksmte.2016.25.1.62
Subject(s) - materials science , nanostructure , silicon , polyethylene terephthalate , microelectromechanical systems , polymer , reactive ion etching , embossing , dry etching , etching (microfabrication) , photolithography , polycarbonate , lithography , nanotechnology , fabrication , optoelectronics , composite material , layer (electronics) , medicine , alternative medicine , pathology
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom