Open AccessA Study on the Optimum Design of the Condenser Lens of a Compact Electrostatic-Type SEM
Author(s) -
Ki-Hwan Kim,
Dong-Young Jang,
Man-Jin Park
Publication year - 2015
Publication title -
journal of the korean society of manufacturing technology engineers
Language(s) - English
Resource type - Journals
eISSN - 2383-4846
pISSN - 2233-6036
DOI - 10.7735/ksmte.2015.24.3.270
Subject(s) - lens (geology) , miniaturization , condenser (optics) , magnification , electrostatic lens , scanning electron microscope , optics , acceleration voltage , resolution (logic) , materials science , sample (material) , voltage , physics , engineering , nanotechnology , electron , electrical engineering , computer science , cathode ray , beam (structure) , artificial intelligence , light source , quantum mechanics , thermodynamics
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