Open AccessX-ray topographical analysis of 4H-SiC epitaxial layers using a forward-transmitted beam under a multiple-beam diffraction condition
Author(s) -
Isaho Kamata,
Yoshiyuki Tsusaka,
Ryohei Tanuma,
Junji Matsui
Publication year - 2018
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/jjap.57.090314
Subject(s) - diffraction , burgers vector , optics , beam (structure) , materials science , enhanced data rates for gsm evolution , hexagonal crystal system , basal plane , x ray crystallography , dislocation , crystallography , physics , chemistry , composite material , computer science , telecommunications
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