Open AccessParticle Simulations of Sheath Dynamics in Low-Pressure Capacitively Coupled Argon Plasma Discharges
Author(s) -
Yoshinori Takao,
Kenji Matsuoka,
Koji Eriguchi,
Kouichi Ono
Publication year - 2011
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/jjap.50.08jc02
Subject(s) - atomic physics , plasma , ion , capacitively coupled plasma , argon , chemistry , voltage , capacitive sensing , debye sheath , materials science , molecular physics , inductively coupled plasma , physics , electrical engineering , organic chemistry , quantum mechanics , engineering
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