Open AccessDirect patterning in ZnO film formation by surface discharge technique
Author(s) -
Masayuki Okuya,
Keigo Nabeta,
Yoshihiro Shibayama,
Shota Kanezashi,
Masato Tan,
Masahiko Iyoda,
Masahiro Shikatani,
Yosuke Sonohara,
I. Yagi
Publication year - 2013
Publication title -
applied physics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.911
H-Index - 94
eISSN - 1882-0786
pISSN - 1882-0778
DOI - 10.7567/apex.7.015501
Subject(s) - materials science , substrate (aquarium) , plasma , crystallization , electrode , chemical engineering , ethylene , surface energy , hexagonal crystal system , optoelectronics , poly ethylene , composite material , chemistry , crystallography , catalysis , oceanography , physics , quantum mechanics , engineering , geology , biochemistry
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