Open AccessPolarity inversion of aluminum nitride by direct wafer bonding
Author(s) -
Yusuke Hayashi,
Ryuji Katayama,
Toru Akiyama,
Ito T,
Hideto Miyake
Publication year - 2018
Publication title -
applied physics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.911
H-Index - 94
eISSN - 1882-0786
pISSN - 1882-0778
DOI - 10.7567/apex.11.031003
Subject(s) - polarity (international relations) , materials science , fabrication , inversion (geology) , monolayer , nitride , wafer , transmission electron microscopy , direct bonding , optoelectronics , nanotechnology , chemistry , geology , layer (electronics) , biochemistry , cell , medicine , paleontology , alternative medicine , pathology , structural basin