Open AccessPolarity inversion of aluminum nitride by direct wafer bonding
Author(s) -
Yusuke Hayashi,
Ryuji Katayama,
Toru Akiyama,
Tomonori Ito,
Hideto Miyake
Publication year - 2018
Publication title -
applied physics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.911
H-Index - 94
eISSN - 1882-0786
pISSN - 1882-0778
DOI - 10.7567/apex.11.031003
Subject(s) - polarity (international relations) , materials science , inversion (geology) , fabrication , monolayer , nitride , wafer , optoelectronics , transmission electron microscopy , nanotechnology , chemistry , layer (electronics) , geology , medicine , paleontology , biochemistry , alternative medicine , pathology , structural basin , cell
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