Three-dimensional integration technology of magnetic tunnel junctions for magnetoresistive random access memory application
Author(s) -
Kay Yakushiji,
Hideki Takagi,
Naoya Watanabe,
Akio Fukushima,
Katsuya Kikuchi,
Yuichi Kurashima,
Atsushi Sugihara,
Hitoshi Kubota,
Shinji Yuasa
Publication year - 2017
Publication title -
applied physics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.911
H-Index - 94
eISSN - 1882-0786
pISSN - 1882-0778
DOI - 10.7567/apex.10.063002
Subject(s) - magnetoresistive random access memory , tunnel magnetoresistance , materials science , nanopillar , magnetoresistance , wafer , ferromagnetism , silicon , epitaxy , spin transfer torque , perpendicular , wafer bonding , optoelectronics , magnetization , condensed matter physics , nanotechnology , magnetic field , nanostructure , random access memory , computer science , layer (electronics) , physics , geometry , mathematics , quantum mechanics , computer hardware
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