Interdiffusion during heteroepitaxial Au growth on Pd thin films by electroless Au plating (ELGP) at room temperature | Zendy

Mingyue Yang | Zendy; Ryo Toyama | Zendy; Phan Trong Tue | Zendy; Yutaka Majima | Zendy

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Interdiffusion during heteroepitaxial Au growth on Pd thin films by electroless Au plating (ELGP) at room temperature

Author(s) -

Mingyue Yang,

Ryo Toyama,

Phan Trong Tue,

Yutaka Majima

Publication year - 2019

Publication title -

applied physics express

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.911

H-Index - 94

eISSN - 1882-0786

pISSN - 1882-0778

DOI - 10.7567/1882-0786/ab5e90

Subject(s) - materials science , nucleation , scanning electron microscope , transmission electron microscopy , electroless plating , plating (geology) , thin film , morphology (biology) , metallurgy , crystallography , composite material , chemical engineering , nanotechnology , chemistry , electroplating , layer (electronics) , organic chemistry , geophysics , geology , biology , engineering , genetics

Electroless Au plating (ELGP) on Pd thin films is performed. The ELGP time dependence on the surface morphology is investigated by a scanning electron microscope. Continuous nucleation and growth of hemispherical Au islands are observed as the plating time increases. Heteroepitaxial growth of the electroless plated Au on the Pd surface is confirmed by cross-sectional scanning transmission electron microscope images. Cross-sectional energy-dispersive X-ray spectroscopy reveals interdiffusion between the Pd atoms and the plated Au atoms at room temperature, which allows the formation of Au–Pd alloys. The heteroepitaxial Au growth on Pd is significant for reducing contact resistance of Au/Pd structures.

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