Open AccessWafer-scale analysis of GaN substrate wafer by imaging cathodoluminescence
Author(s) -
Wei Yi,
Jun Chen,
Seiji Higuchi,
Takashi Sekiguchi
Publication year - 2019
Publication title -
applied physics express
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.911
H-Index - 94
eISSN - 1882-0786
pISSN - 1882-0778
DOI - 10.7567/1882-0786/ab0db8
Subject(s) - cathodoluminescence , wafer , homogeneity (statistics) , materials science , optoelectronics , substrate (aquarium) , computer science , geology , luminescence , oceanography , machine learning
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