Open AccessSelf-contained on-chip fluid actuation for flow initiation in liquid cell transmission electron microscopy
Author(s) -
Vivek Me,
Matthieu Denoual,
Hiroshi Toshiyoshi,
Hiroyuki Fujita
Publication year - 2019
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/1347-4065/ab386a
Subject(s) - materials science , capillary action , chip , transmission electron microscopy , microfluidics , flow (mathematics) , optoelectronics , microelectromechanical systems , volumetric flow rate , fluid dynamics , nanotechnology , electrical engineering , composite material , mechanics , physics , engineering
Liquid cells for transmission electron microscopy enable the observation of liquid samples with nanometer resolution, but sample activity must often be triggered via external stimuli including liquid flow and mixing. Existing devices enable flow using specialized TEM holders and external pumping setups which limits technique accessibility. Here, a liquid cell with integrated MEMS valves and pumps is demonstrated with flow capabilities using an electrical-contact holder. On-chip electrochemical pumps and capillary burst valves allow for the injection of fluid from an integrated reservoir into an observation chamber using only electrical signals from a general microchip-sized TEM holder.