Open AccessElastic–plastic deformation of single-crystal silicon in nano-cutting by a single-tip tool
Author(s) -
Ning Huang,
Ying Yan,
Ping Zhou,
Rengke Kang,
Dongming Guo
Publication year - 2019
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/1347-4065/ab2b71
Subject(s) - materials science , scratch , grinding , brittleness , deformation (meteorology) , composite material , nano , single crystal , silicon , metallurgy , crystallography , chemistry
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