Open AccessUltraviolet-B band lasers fabricated on highly relaxed thick Al0.55Ga0.45N films grown on various types of AlN wafers
Author(s) -
Yuta Kawase,
Syunya Ikeda,
Yusuke Sakuragi,
Shinji Yasue,
Sho Iwayama,
Motoaki Iwaya,
Tetsuya Takeuchi,
Satoshi Kamiyama,
Isamu Akasaki,
Hideto Miyake
Publication year - 2019
Publication title -
japanese journal of applied physics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.487
H-Index - 129
eISSN - 1347-4065
pISSN - 0021-4922
DOI - 10.7567/1347-4065/ab0d04
Subject(s) - materials science , cathodoluminescence , wafer , optoelectronics , ultraviolet , laser , layer (electronics) , epitaxy , power density , doping , dislocation , metalorganic vapour phase epitaxy , crystal (programming language) , optics , nanotechnology , luminescence , composite material , power (physics) , physics , quantum mechanics , computer science , programming language
In this paper, we investigated the dependence of threshold power density on the Al 0.55 Ga 0.45 N underlying layer film thickness in ultraviolet-B band (UV-B) lasers on various AlN wafers (four types). We also prepared and compared AlN templates for AlN freestanding substrates, AlN films fabricated by metalorganic vapor phase epitaxy, and annealed sputtered AlN templates at high temperature. The initial growth of AlGaN became three-dimensional by inserting a homoepitaxial Ga-doped AlN layer between the AlN template and Al 0.55 Ga 0.45 N, before it shifted to two-dimensional growth. It is possible to reduce the dislocation in Al 0.55 Ga 0.45 N using this mode. The dependence of AlGaN film thickness and that of the AlN template on samples with an inserted homoepitaxial Ga-doped AlN layer were studied. Compared with Al 0.55 Ga 0.45 N having a thickness of 5 μ m, there was almost no noticeable difference between the dark spot density characterized by cathodoluminescence and the threshold power density in UV-B lasers for the AlN template. Besides, the characteristics were noticeably different for the film thickness of Al 0.55 Ga 0.45 N. The threshold power density in UV-B laser and dark spot density were reduced by increasing the film thickness. Through the optimization of the crystal growth condition, the threshold power density in UV-B laser and dark spot density were reduced to 36 kW cm −2 and 7.5 × 10 8 cm −2 , respectively.