Open AccessTime domain theory of the electronic transport property of semiconductors measured by means of square-wave-modulated free carrier absorption technique
Author(s) -
Xiren Zhang,
Chunming Gao
Publication year - 2014
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.63.137801
Subject(s) - free carrier absorption , time domain , semiconductor , materials science , wafer , absorption (acoustics) , thermal diffusivity , modulation (music) , signal (programming language) , frequency domain , computational physics , optoelectronics , physics , computer science , acoustics , thermodynamics , composite material , computer vision , programming language
A time-domain model for the square-wave-modulated free carrier absorption (MFCA) is developed in measuring the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) of semiconductor wafers. The dependences of time-domain MFCA signals on the electronic transport properties at different modulation frequencies are investigated by computer simulation. It is found that there are the high sensitivities of MFCA signal to the individual transport parameter. Furthermore, compared with the results by frequency-domain MFCA, in time-domain MFCA measuring ranges the transport properties can be improved.