Open AccessExperimental investigation and numerical simulation of defect elimination by CO2 laser raster scanning on fused silica
Author(s) -
Yong Jiang,
Suqin He,
Xiaodong Yuan,
Haijun Wang,
Wei Liao,
Hongbo Lu,
Chunming Liu,
Xiang Xi,
Rong Qiu,
Yue Yang,
Wanguo Zheng,
Xiaotao Zu
Publication year - 2014
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.63.068105
Subject(s) - polishing , raster scan , materials science , raster graphics , laser , substrate (aquarium) , optics , composite material , computer science , physics , artificial intelligence , oceanography , geology
Based on the fact that fused silica material can strongly absorb 10.6 μm CO2 laser, a method of using CO2 laser multi-time raster scanning to repair the densely distributed scratches and polishing pits is investigated. The experimental results indicate that the scratches and polishing pits can be fully eliminated under the appropriate parameters. The damage threshold testing results also indicate that the damage threshold for fully eliminating scratches and polishing pits can reach or exceed the damage threshold of substrate. Meanwhile, Combining the simulation results obtained by finite element software-Ansys, the processes of the scratches and polishing pits eliminated by CO2 laser are analyzed. The present work is of significance for the study on how to eliminate the scratches and polishing pits on the surface of component.