Open AccessA 3D profile evolution method of ion etching simulation based on compression representation
Author(s) -
Hongjun Yang,
Yong Song,
Zheng Shu-Lin,
Jia Pei-Fa
Publication year - 2013
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.62.208201
Subject(s) - representation (politics) , ion , computer science , compression (physics) , materials science , composite material , physics , quantum mechanics , politics , political science , law