Open AccessPhase resolved optical emission spectroscopy of dual frequency capacitively coupled plasma
Author(s) -
Du Yong-Quan,
Wenyao Liu,
AiMin Zhu,
XiaoSong Li,
Zhao Tianliang,
Liu Yongxin,
Fei Gao,
Xu Yong,
YouNian Wang
Publication year - 2013
Publication title -
acta physica sinica
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.62.205208
Subject(s) - plasma , argon , materials science , atomic physics , spectroscopy , capacitively coupled plasma , inductively coupled plasma , physics , nuclear physics , quantum mechanics
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