Open AccessPhase resolved optical emission spectroscopy of dual frequency capacitively coupled plasma
Author(s) -
Yong-Quan Du,
Wen-Yao Liu,
AiMin Zhu,
Xiaosong Li,
Tianliang Zhao,
Yongxin Liu,
Fei Gao,
Yong Xu,
YouNian Wang
Publication year - 2013
Publication title -
wuli xuebao
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.62.205208
Subject(s) - plasma , argon , materials science , atomic physics , spectroscopy , capacitively coupled plasma , inductively coupled plasma , physics , nuclear physics , quantum mechanics