Open AccessStudy on atomic layer deposition preparation of core-shell structured nanometer materials
Author(s) -
Yong Li,
Huiqi Li,
Yang Xia,
Bangwu Liu
Publication year - 2013
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.62.198102
Subject(s) - x ray photoelectron spectroscopy , materials science , atomic layer deposition , high resolution transmission electron microscopy , crystallite , amorphous solid , thin film , transmission electron microscopy , nanometre , nanotechnology , nanoparticle , layer (electronics) , chemical engineering , analytical chemistry (journal) , crystallography , composite material , chemistry , engineering , metallurgy , chromatography
Monocrystal Pt nanoparticles, amorphous Al2O3 thin film, polycrystalline ZnO and TiO2 thin films were fabricated on black carbon nanoparticles by means of atomic layer deposition (ALD). Using high resolution transmission electron microscopy (HRTEM), X-ray photoelectron spectrometer (XPS), energy dispersive spectroscopy (EDS), We have characterized and analyzed the surface morphology, crystal structure and composition of the ranopasticles and thin filins. Results indicate that the ALD method is an ideal method to prepare core-shell stuctured nanometer materials. In addition, the reasons why the formation of ALD films with different crystal morphologies, such as monocrystal, amorphous, polycrystalline, were discussed.