Open AccessDeuterium retention in carbon-tungsten co-deposition layers prepared by RF magnetron sputtering
Author(s) -
Wenzhao Zhang,
Tang Xing-Hua,
Jiaqing Li,
Liqun Shi
Publication year - 2013
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.62.195202
Subject(s) - materials science , raman spectroscopy , scanning electron microscope , sputter deposition , graphite , analytical chemistry (journal) , tungsten , sputtering , deposition (geology) , cavity magnetron , layer (electronics) , ion beam analysis , ion , ion beam , thin film , nanotechnology , optics , composite material , chemistry , metallurgy , paleontology , physics , sediment , biology , organic chemistry , chromatography
The C-W co-deposition layer prepared by radio frequency magnetron sputtering was investigated to identify the characteristic of the C-W mixed layers in fusion experimental reactors. Layers were characterized by ion beam analysis (IBA), Raman spectra (RS) and scanning electron microscopy (SEM). It was found that D atoms in C-W layers are mainly trapped by the trapping site of C atoms, only a few of them are arrested by W atoms or defects. D concentration in the C-W layers deposited at 5.0Pa with a fixed flow rate ratio QD2/QAr=2.5 was lower than 10% and decreased slightly with increasing temperature. D concentration increased with the gas pressure from zero to 5 Pa and then decreased from 5 Pa to 10 Pa. RS revealed that the crystal structure of the C-W layers became graphite-like with increasing temperature. SEM images showed that the caves disappeared and convex bodies were dotted on the surfaces as the temperature increased.