Open AccessResidual stress analysis by grazing-incidence X-ray diffraction on beryllium films
Author(s) -
Jia Li,
Qi Fang,
Luo Bing-Chi,
Zhou Min-Jie,
Kai Li,
Weidong Wu
Publication year - 2013
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.62.140701
Subject(s) - residual stress , materials science , beryllium , diffraction , isotropy , residual , stress (linguistics) , optics , thin film , incidence (geometry) , composite material , physics , mathematics , nanotechnology , nuclear physics , algorithm , linguistics , philosophy
Measurements of residual stress in beryllium thin film under standard Bragg-Brentano geometry are always problematic. In this article, a new experimental method using grazing- incidence X-ray diffraction is presented according to the convential sin2Ψ method, which effectively increases the signal-to-noise ratio. Analysis shows that the assumption (isotropic material) is logical, because the values of stress results from the three families of planes are camparable. The stress gradient can be measured at diffrenent grazing incidence angles. The results indicate the uniformity of the residual stress of the thin film along various Φ directions.