Open AccessSimulation of characteristics of ZnO/diamond/Si structure surface acoustic wave
Author(s) -
Ziyu Zhou,
W. LiMing,
Feng Jiang
Publication year - 2013
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.62.104601
Subject(s) - materials science , diamond , surface acoustic wave , diamond cubic , coupling (piping) , phase velocity , surface (topology) , phase (matter) , electromechanical coupling coefficient , acoustics , optics , composite material , physics , geometry , mathematics , quantum mechanics , piezoelectricity
Based on the recursive stiffness matrix method, the effective surface permittitivity model of multilayered surface acoustic wave structure is established. By this model, the frequency dispersive characteristic of phase velocity for the ZnO/Si layered structure is calculated. The calculation results are in agreement with the experimental results, which verifies the effectiveness and accuracy of the model. Furthermore, the model is also established for the determination of the phase velocity and electromechanical coupling coefficients of ZnO/Diamond/Si structure. The best combination of high velocity and high coupling coefficient of the structure is obtained, which provides a good reference for the design of a high-performance and high-capability surface acoustic wave device.