Open AccessInfluence of SiC intermediate layer on adhesion property of F-DLC film
Author(s) -
Pan Yue,
Qiang Zhen,
Junbo Ge,
Zhou Yang,
Jiang Mei-Fu,
Yang Yi-Shang
Publication year - 2013
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.62.015209
Subject(s) - materials science , adhesion , layer (electronics) , diamond like carbon , substrate (aquarium) , composite material , deposition (geology) , sputter deposition , adhesive , sputtering , carbon fibers , thin film , chemical engineering , nanotechnology , paleontology , oceanography , sediment , geology , composite number , engineering , biology
Two kinds of films are deposited on 316L stainless steel substrates by radio frequency reactive magnetron sputtering technique. One is fluorinated diamond-like carbon film (F-DLC) deposited on the 316L stainless steel substrate directly and the other is F-DLC with SiC intermediate layer. This paper focuses on the changing regulation of film adhesion with preparation condition. As the result, the adhesion of fluorinated diamond-like carbon film with SiC intermediate layer is obviously much better than that of F-DLC, and the adhesion is dependent on preparation condition of preparation SiC intermediate layer. The adhesion of F-DLC can reach 8.7 N with 200 W RF input power and 5 min deposition time, which is much bigger than the adhesion of F-DLC without intermediate layer (4 N). The mechanism of the preparation condition of SiC influencing the adhesive force of F-DLC is studied by investigating the deposition rate curve, surface morphology and infrared spectrum.