Open AccessEffect of cylinder-electrode on magnetoelectric heating of ions
Author(s) -
Zhibin Ma,
Shen Wu-Lin,
Wu Jun,
Yiyan Lei,
Jianhua Wang
Publication year - 2013
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.62.015202
Subject(s) - electrode , materials science , ion , anode , cylinder , atomic physics , electron cyclotron resonance , analytical chemistry (journal) , chemistry , physics , mechanical engineering , engineering , organic chemistry , chromatography
A highly-efficient magnetoelectric heating not only improves ion temperature of electron cyclotron resonance (ECR) plasma, but also reforms the radial and axial distribution of ions, thereby promoting the application of ECR plasma to the etching of chemical vapor deposition diamond films. In this paper, a ring-electrode is replaced by a cylinder-electrode, and the effects of cylinder-electrode on the ion temperature and density are studied. The ion heating effects in the cases of cylinder-electrode and ring-electrode are compared. The results indicate that cylinder-electrode can produce higher ion temperature than ring-electrode at the same anode voltage. Ion temperature at each radial point changes a lot when the cylinder-electrode is used to heat ions. The ion temperature inside cylinder-electrode has a big radial variation while it has a good radial uniformity at downstream of cylinder-electrode. The effect of magnetoelectric heating on ion density is small. Using cylinder-electrode to heat ion is beneficial to the transport and axial uniformity of ions.