Open AccessDesign and fabrication of 1000 line/mm soft X-ray freestanding blazed transmission gratings
Author(s) -
Yong Chen,
Keqiang Qiu,
Xiangdong Xu,
Zhengkun Liu,
Ying Liu,
Shaojun Fu
Publication year - 2012
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.61.120702
Subject(s) - blazed grating , materials science , optics , grating , holographic grating , fabrication , diffraction efficiency , diffraction , holography , diffraction grating , specular reflection , ultrasonic grating , optoelectronics , wavelength , physics , medicine , alternative medicine , pathology
The performance prediction of freestanding blazed transmission grating is discussed using scalar diffraction theory, and grating design parameters are accodingly given. A freestanding transmission grating with a period of 1 m, duty cycle of 0.10.2, aspect ratio of about 100, thickness of 10 m and fractional area of 65% is successfully fabricated by holographic lithography and anisotropic wet etching. The size of a single die is 15 mm 15 mm divided into four 5 mm 5 mm windows. The diffraction efficiency of the fabricated grating is tested at the National Synchrotron Radiation Laboratory in a wavelength region of 550 nm. The wavelength scanning results show a strong blazing effect in the direction of specular reflection from mirror-like grating sidewalls, as expected. The measured and normalized diffraction efficiency is consistent with the theoretical prediction within 38%49% due to grating structural imperfections. These experimental results prove not only the concept of blazed transmission grating but also practicability of the fabrication process.