Open AccessPlasma parameters of square superlattice pattern in a dielectric barrier discharge
Author(s) -
Junying Chen,
Lifang Dong,
Yuanyuan Li,
Qi Song,
Ji Ya-Fei
Publication year - 2012
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.61.075211
Subject(s) - vibrational temperature , excitation temperature , dielectric barrier discharge , materials science , electron temperature , plasma , superlattice , electron density , atomic physics , emission spectrum , dielectric , electron , excitation , spectral line , physics , optoelectronics , quantum mechanics , astronomy
Dielectric barrier discharge is an important method of producing nonequilibrium low-temperature plasma. Measurement of the plasma parameters is highly valuable for its industrial application. Plasma parameters of square superlattice pattern are investigated by optical emission spectroscopy in a dielectric barrier discharge by using a two-liquid-electrode dielectric barrier discharge device in argon at atmospheric pressure. It is found that the light intensity of the large diameter microdischarge channel(big dot) is different from that of the small diameter channel (small dot). Vibrational temperature is investigated by using the N_{2} second positive spectrum. Electronic excitation temperature is measured by means of spectral line intensity ratio. Electron density is obtained by using the stark broadening of Ar atom 696.54 nm spectral line. The results show that the electron density and the vibrational temperature of the small dot are larger than those of the big dot but the electronic excitation temperature is lower than that of the big dot. It is suggested that the plasma state of the big dot is different from that of the small dot in the stable square superlattice pattern.