Open AccessFourier transform profilometry of tilted measurement system
Author(s) -
Jun Xu,
Min Wang,
Pei Hui,
Xiaohui Liu,
Qi Xiao-Li,
Xu Si-Xiang
Publication year - 2011
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.60.074210
Subject(s) - profilometer , optics , fourier transform , plane (geometry) , fourier optics , system of measurement , point (geometry) , physics , computer science , mathematics , geometry , quantum mechanics , astronomy , surface roughness
Based on the resarch of the traditional Fourier transform profilometry, Fourier transform profilometry of tilted measurement system is proposed in this paper. The proposed technology makes the three constraints of the traditional Fourier transform profilometry measurement system less stringent. The optical axis in the CCD imaging system is not necessarily perpendicular (with a certain tilting angle) to the reference plane. The connection line between the centers of the exit pupil of the projecting system and the entrance pupil of the CCD imaging system is not required to be horizontal to the reference plane. The optical axis of the CCD imaging system and that of the projecting system are not coplanar, moreover, the two axises do not intersect at a point in the reference plane. Through the stringent theoretical analysis, the mathematical relationship between phase and height is obtained. Compared with the traditional Fourier transform profilometry, the tilted measurement system is more practical.