The research of the air-sensitive sensor based on thephotonic crystal beam splitter
Author(s) -
Yanmei Kong,
Chaoqun Gao,
Yupeng Jing,
Dapeng Chen
Publication year - 2011
Publication title -
acta physica sinica
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.60.054215
Subject(s) - beam splitter , splitter , microelectromechanical systems , beam (structure) , optics , materials science , beam steering , high resolution , computer science , resolution (logic) , optoelectronics , physics , remote sensing , artificial intelligence , laser , geology
The spectroscopy is the ultimate way for chemical analysis. This paper mainly describes the idea of an air-sensitive sensor based on MEMS technology, and more over, a photonic crystal (PC) beam splitter was designed, which can achieve high resolution beam steering, and this improves the resolution of the sensor. The paper offers a new idea and lays the foundation for the novel beam splitter that applied to many optical systems.
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