Open AccessFabrication of superconducting nanowiresingle-photon detector
Author(s) -
Labao Zhang,
Lin Kang,
Jian Chen,
Zhao Qing-Yuan,
Tao Jiang,
Wei Xu,
Chunhong Cao,
Biaobing Jin,
Peiheng Wu
Publication year - 2011
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.60.038501
Subject(s) - fabrication , detector , materials science , wavelength , nanowire , optoelectronics , superconductivity , optics , photon , physics , condensed matter physics , medicine , alternative medicine , pathology
In this paper,the fabrication details and optimization of micro-fabrication process are presented for developing superconducting nanowire single-photon detectors (SNSPD). Besides,the device failure analysis is also introduced. With those methods,we successfully fabricated high-quality SNSPDs whose maximum system efficiencies were up to 30% for 660 nm wavelength and 4.2% for 1550 nm wavelength according to the single-photon detection experiment. At the dark count rate of 10 c/s,the detection efficiencies were 20% (660 nm) and 3% (1550 nm) with the SNSPD fabricated with above mentioned methods.