Open AccessScanning tunnelling microscope investigation of the TiSi2 nano-islands on Sr/Si(100) surface
Author(s) -
Yang Jingjing,
Weijie Du
Publication year - 2011
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.60.037301
Subject(s) - annealing (glass) , scanning tunneling microscope , materials science , silicon , oxide , silicon monoxide , nanoscopic scale , quantum tunnelling , nano , forming gas , silicon oxide , thin film , pulsed laser deposition , analytical chemistry (journal) , nanotechnology , optoelectronics , metallurgy , chemistry , composite material , silicon nitride , chromatography
For the investigation of the interface stability of SrTiO3/Sr/Si(100) system during high temperature annealing process, we have grown 1—2 atom layer SrTiO3 ultra-thin film on Sr/Si(100)-2×1 substrate using pulsed laser deposition technique. After annealing, we found that nano-scale islands appear in the surface. These nano-islands show metallic property by scanning tunneling microscopy, and the STM image shows bias voltage dependence of these nano-islands. Oxygen in the oxide reacts with silicon and forms volatile silicon monoxide during vacuum annealing, while Ti atoms in the oxide react with silicon, forming C-54 TiSi2 islands.