Open AccessDesign and fabrication of micro multi-mirrors based on silicon for micro-spectrometer
Author(s) -
Bo Wang,
Zhongzhu Liang,
Yanmei Kong,
Jingqiu Liang,
Jianlong Fu,
Zheng Ying,
Zhu Wan-Bin,
Jin-guang Lü,
Weibiao Wang,
Shu Pei,
Jun Zhang
Publication year - 2010
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.59.907
Subject(s) - fabrication , materials science , spectrometer , etching (microfabrication) , silicon , interference (communication) , surface roughness , surface finish , dry etching , root mean square , optics , core (optical fiber) , optoelectronics , nanotechnology , composite material , physics , computer science , layer (electronics) , medicine , computer network , channel (broadcasting) , alternative medicine , pathology , quantum mechanics
A micro-spectrometer without moving parts that can be manufactured through micro-opto-electro-mechanical system techniques is developed, and the interference system is introduced. The fabrication of the micro multi-mirrors, which is the core part of the system, is investigated and wet etching of silicon in KOH solution is testified to be a good method. The root mean square surface roughness of the reflect surface made up of Si planes 111 through wet etching is less than 10 nm.