Frictional properties of fluorinated diamond-like carbon films prepared by radio frequency reactive magnetron sputtering | Zendy

Peijun Wang | Zendy; Meifu Jiang | Zendy; Du Ji-Long | Zendy; Dai Yong-Feng | Zendy

Open Access

Frictional properties of fluorinated diamond-like carbon films prepared by radio frequency reactive magnetron sputtering

Author(s) -

Peijun Wang,

Meifu Jiang,

Du Ji-Long,

Dai Yong-Feng

Publication year - 2010

Publication title -

acta physica sinica

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.199

H-Index - 47

ISSN - 1000-3290

DOI - 10.7498/aps.59.8920

Subject(s) - materials science , raman spectroscopy , diamond like carbon , nanoindenter , graphite , sputter deposition , analytical chemistry (journal) , sputtering , fourier transform infrared spectroscopy , carbon fibers , carbon film , composite material , thin film , nanotechnology , elastic modulus , chemical engineering , optics , chemistry , organic chemistry , physics , engineering , composite number

The fluorinated diamond-like carbon (F-DLC) films are prepared by radio frequency reactive magnetron sputtering with different flow ratios of CHF3 and Ar as a source gas and pure graphite as a target. Surface morphology, hardness, bonding configuration and tribological properties are investigated by atomic force microscope, nanoindenter, Raman spectra, Fourier transform infrared (FTIR) spectra and a ball-on-disk test rig, respectively. The results show that the F-DLC films are distributed compactly and homogeneously and exhibit good friction-reducing behaviors. The minimum of friction coefficient reaches about 0.42 at r=1 ∶6 while the hardness of films is highest. Raman spectra and FTIR spectra reveal that with the increase of r, the fluorine content gradually increases. However, the intensity ratio ID/IG of Raman bands of disordered graphite (D-band) and graphite (G-band) of F-DLC films decreases, which is indicative of the decrease of the fraction of aromatic ring. The results also show that the F content is another significant factor which affects the friction coefficient. The weakening of —CF2 asymmetric stretch vibration intensity and the formation of CFH in C C chains may result in a lower friction coefficient of F-DLC films.

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