Open AccessComposition, microstructure and properties of C-N-V films prepared by pulsed bias arc ion plating
Author(s) -
李红凯,
林国强,
董闯
Publication year - 2010
Publication title -
wuli xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.199
H-Index - 47
ISSN - 1000-3290
DOI - 10.7498/aps.59.4296
Subject(s) - materials science , microstructure , nanocrystalline material , raman spectroscopy , amorphous solid , nanoindentation , x ray photoelectron spectroscopy , scanning electron microscope , nanocomposite , analytical chemistry (journal) , phase (matter) , diamond like carbon , transmission electron microscopy , amorphous carbon , composite material , chemical engineering , thin film , crystallography , nanotechnology , optics , chemistry , physics , engineering , organic chemistry , chromatography
High quality C-N-V films with different compositions were prepared on cemented carbide substrate using pulsed bias arc ion plating. The surface morphology, composition, microstructure and properties of C-N-V films were investigated by scanning electron microscopy, transmission electron microscopy, X-ray photoelectron spectroscopy, Raman spectra, grazing incident X-ray diffraction, and nano-indentation, respectively. The results show that the deposited films were nanocomposite films with VN nanocrystalline phase imbedded within diamond-like carbon(DLC) amorphous matrix. The hardness and elastic modulus, which are closely related to the composition and structure of the film, first increase and then decrease with increasing V and N contents and have the highest values of 368 and 5697 GPa exceeding that of pure DLC film prepared under the same condition when nitrogen content is 204% and vanadium content is 218%. The variation of V and N contents has significant influence on the phase structure, relative concentration of VN crystalline phase and DLC amorphous phase, and induces the formation of nano-diamond phase, hence has great effect on the properties of the films.